JensenBreck created the topic: Back Calculating Correct Thickness from FTM
We recently got our Edwards ebeam up and running. First deposition was Al, we thought. We set up the FTM with Z and density for AL. Ran three samples, 1 ~100nm, 2 ~200nm, and 3 ~300nm. Ran RBS on samples to calculate tooling factor. Realized films were Ti, not Al.
Was wondering if anyone out there would know how to calculate corrected thickness with proper Z and density for Ti, with #s from Al?
I didn't find the right solution from the Internet.